Mitutoyo TM-500 Series Manual de usuario descargar pdf (Pagina 8)

J-23

Large, Highly Accurate XY Stage

The XY stage is a massive, highly stable design created

using mechanical techniques developed over Mitutoyo’s

long years of experience in manufacturing precision

measuring microscopes. Maximum stage loading is

30kg and a range of useful ﬁxtures is available that

includes a wafer holder and swivel-center support.

LAF Optical Tube

TheLAF(LaserAutoFocus)opticaltubecanbe

selected.TheLAFsystemachieveshighrepeatability

when measuring minute steps, etc., enabling difﬁcult

measurements with minimum fatigue.

*AvailableformodelMF-Uonly

ImagegraphicofAF

optical path

TheLAFusesalow-power

laser that corresponds to

Class2(visibleradiation)

ofJISC6802/1997,Safety

ofLaserProducts.

Three-axis Motor-driven Joystick

The X, Y, and Z axes are driven and controlled

withonejoystickthatservesasthenervecenterof

operation. Speed control is possible from high-speed

traverse of the stage to ultra low-speed, precise

positioning of a workpiece.

250mm

150mm

Highly Accurate Digital Scales

These microscopes are equipped with highly accurate

digital glass scales on all three axes. Mitutoyo

produces glass scales in an underground laboratory

where the temperature and humidity are constant

throughout the year. The XY (stage) and Z (optical

tube) displacements are displayed digitally.

880 913

880

Hyper MF

Hyper MF-U

913

770

730

470

262

676

262

QM-Data200

2-D data processing unit

(Refer to page J-26 for more details.)

Optional Accessories

SeepageJ-19forHyperMFmodels.

SeepageJ-21forHyperMF-Umodels.

Vision Unit

PC-basedvisionmeasuringsystem

(Refer to page J-28 for more details.)

DIMENSIONS

Unit: mm

1 2 3 4 5 6 7 8 9 10 11 12 13 ... 24 25

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Mitutoyo TM-500 Series Manual de usuario Pagina 8

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