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Mitutoyo TM-500 Series Manual de usuario Pagina 15

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J-30
RefertotheFS300leaet(E4197)formore
details.
J
FS-300
SERIES 378 — High Power Inspection Microscope
FEATURES
•ThecompleteFS-300systemcanbe
composedofavarietyofcomponentsfor
meetingdiverseapplications.
•Availablewithorwithoutatransmitted-
lightilluminator.
•Ultra-longworkingdistanceobjectives
provideeasymanipulationofworkpieces.
•Easyswitchingbetweenbright-eld
illuminationanddark-eldillumination.
•Optionalaccessorieswidentherangeof
applications.
FS-300withoptional
accessories
TheFS-300isdesignedforinspectingmicro-
componentssuchasICchipsandvideohead
parts.Theopticalsystemfeaturesultra-long
workingdistanceobjectives,widevieweld
eyepieces,andindependentcorrectionfor
lateralchromaticaberration.
SPECIFICATIONS
Mainunit Observationsystem Brighteld(BF):378-320, 378-322, 378-324, 378-326
Bright/darkeld(BF/DF):378-321, 378-323, 378-325, 378-327
Reectedillumination Koehlerilluminationwithaperturediaphragm(centeringmechanism)andeldstop
12V/100Whalogenlamp(non-steppedbrightnessadjustment)Withltermounting
slot(2-slot)withBF/DFswitchingslide(378-321, 378-323, 378-325, 378-327only)
Transmittedillumination 12V/100Wberillumination(non-steppedbrightnessadjustment)withaperture
diaphragm(378-323, 378-324, 378-326, 378-327only)
Focusadjustment Withconcentriccoarseandnefocusingwheels(rightandleft)
Fineadjustment:0.1mm/rev.for32mmtravelrange
Coarseadjustment:3.8mm/rev.for32mmtravelrange
Powerturret Inwardtypewith4lensmounts
Workstage Travelstroke:356x306mmwithX-/Y-axisnefeedknobsandcoarsetravelhandle
Opticaltube Type Trinoculartube(erectimage)
Fieldnumber 24
Depressionangle Fixed20º:378-320, 378-321, 378-322, 378-323
Adjustable0ºto20º:378-324, 378-325, 378-326, 378-327
Intermediateimagemag. 1X
Opticalpassratio Siedentopftype,adjustmentrange:51-76mm
Pupildistance Siedentopftype,adjustmentrange:51-76mm
Eyepiece Fieldofview 10X/ø30:378-320, 378-321, 378-322, 378-323
10X/ø24:378-324, 378-325, 378-326, 378-327
Applicableobjective(optional) MPlanApo,MPlanApoSL,GPlanApo:378-320, 378-322, 378-324, 378-326
BDPlanApo,BDPlanApoSL:378-321, 378-323, 378-325, 378-327
Dimensions Mainunit 360x803x568.5mm
Workstage 700x400mm
Powersupply 100to240VAC,50/60Hz
Powerconsumption Approx.150W:378-320, 378-321, 378-324, 378-325
Approx.300W:378-322, 378-323, 378-326, 378-327
Mass Approx.50kgincludingworkstage
Polarized light observation:
Observingonlythelteredlightthatvibrates
inonedirection.Usedforobservingmaterials
withspecialopticalcharacteristics,suchas
mineralandliquidcrystal.
Differential interference observation:
Effectiveindetectingnescratchesandsteps
onthesurfaceofmetal,liquidcrystal,and
semiconductors.
Dark field observation:
Observingonlythescatteredlightbyshutting
downthedirectlighttotheobjectives.The
scratchesanddustthatcannotbeviewedin
thebrightvieweldcanbeobservedbythis
methodinhigh-contrast.
Bright field observation:
Mostcommonmethodofobservation.
Observingdirectlythelightreectedfromthe
surfaceoftheworkpiece..
Optional Accessory
378-856: 10Xeyepiece(Fieldnumber:24),2pcs./set
378-857: 15Xeyepiece(Fieldnumber:16),2pcs./set
378-858: 20Xeyepiece(Fieldnumber:12),2pcs./set
378-851: Extra-wide10Xeyepiece(Fieldnumber:30)*
378-003: Trinoculartube,1X(Erectimage)
378-004: Trinoculartube,1X(Invertedimage)
378-001: Trinoculartube,1X/2Xswitchable
(Erectimage)
12AAA646:Colorlter(LB80)
12AAA643:Colorlter(ND2)
12AAA644:Colorlter(ND8)
12AAA645:Colorlter(Green)
378-031: Reectedilluminationunit(Bright/darkeld)
378-032: Reectedilluminationunit(Brighteld)
378-085: Lightsourceunit**
378-013: Turretw/4lensmounts(B/Deld)
378-014: Turretw/4lensmounts(Brighteld)
378-015: Turretw/5lensmounts(Brighteld)
378-074: Polarizingunit
378-075: Bright/darkeldswitchingunit
378-021: Workstage(6”x6”),Right-handedtype
378-023: Workstage(8”x8”),Right-handedtype
514024: Stageglassfor6”x6”workstage
514025: Stageglassfor8”x8”workstage
378-051: Waferholder(3”DIA.-6”DIA.)
378-055: Maskholder(3”x3”)
378-056: Maskholder(4”x4”)
378-058: Maskholder(6”x6”)
378-076: Differentialinterferencecontrastunit
(100X,SL80,SL50X)
378-078: Differentialinterferencecontrastunit
(50X,SL20X)
378-079: Differentialinterferencecontrastunit
(20X)
378-080: Differentialinterferencecontrastunit
(10X,5X)
378-041: CCDcameramountadapter
––––––: Objectives(SeepageJ-36)
*Canbeusedwiththespecialtrinoculartube(378-001).
**Lightsource:Halogenbulb(12V,50W)
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