Mitutoyo TM-500 Series Manual de usuario descargar pdf (Pagina 16)

J-31

FS-70

SERIES 378 — Microscope Unit for Semiconductor Inspection

ShortbasemodelNo.

FS70-S FS70-THS FS70Z-S FS70Z-THS FS70L-S FS70L-THS FS70L4-S FS70L4-THS

Order No. 378-184-2 378-184-4 378-185-2 378-185-4 378-186-2 378-186-4 378-187-2 378-187-4

Focusadjustment 50mmtravelrangewithconcentriccoarse(3.8mm/rev)andne(0.1mm/rev)focusingwheels(right/left)

Image Erectimage

Pupildistance Siedentopftype,adjustmentrange:51-76mm

Fieldnumber 24

Tiltangle — 0°-20° — 0°-20° — 0°-20° — 0°-20°

Opticalpassratio 50/50 100/0or

0/100

50/50 100/0or

0/100

100/0or0/100 100/0or0/100

Protectivelter — — Built-inlaserbeamlter Built-inlaserbeamlter

Tubelens 1X 1X-2Xzoom 1X 1X

Applicablelaser — — 1064/532/355nm 532/266nm

Cameramount C-mount(usingoptionaladapterB) UsealaserwithTVport. C-mountreceptacle

(withgreenlterswitch)

Illumination

system,optional

Reectiveilluminationforbrighteld(Koehlerillumination,withaperturediaphragm)

12V100Wber-optics,non-steppedadjustment,lightguidelength:1.5m,powerconsumption150W

Objective,optional

(forobservation)

MPlanApo,MPlanApoSL,GPlanApo

Objective,optional

(forlaser-cutting)

— M/LCDPlanNIR,

M/LCDPlanNUV

MPlanUV

Loading* 14.5kg 13.6kg 14.1kg 13.2kg 14.2kg 13.5kg 13.9kg 13.1kg

Mass(mainunit) 6.1kg 7.1kg 6.6kg 7.5kg 6.4kg 7.2kg 6.7kg 7.5kg

*Loadingonopticaltubeexcludingweightofobjectivelensesandeyepieces

SPECIFICATIONS

ModelNo. FS70 FS70-TH FS70Z FS70Z-TH FS70L FS70L-TH FS70L4 FS70L4-TH

Order No. 378-184-1 378-184-3 378-185-1 378-185-3 378-186-1 378-186-3 378-187-1 378-187-3

FEATURES

•Theopticalsystemthatwasoriginally

developedforthebest-sellingFS60

modelswasfurtherenhancedfortheFS70

models.Itisidealasthemicroscopeunit

ofaproberstationforsemiconductors.(All

modelsCEmarked.)

•TheFS70LsupportsthreetypesofYAG

laserwavelengthranges(1064nm,532nm

and355nm),whiletheFS70L4supports

twotypesofwavelengthranges(532nm

and266nm),thusexpandingthescopeof

laserapplications,allowinglaser-cutting

ofthin-lmsusedinsemiconductorsand

liquidcrystalsubstrates.However,Mitutoyo

assumesnoresponsibilitywhateverfor

theperformanceand/orsafetyofthelaser

systemusedwithMitutoyomicroscopes.

Acarefulexaminationisrecommendedin

selectingalaser-emissionunit.

•Brighteld,DifferentialInterference

Contrast(DIC)andpolarizedobservations

arestandardwiththeFS70Z.TheFS70L

andFS70L4donotsupporttheDIC

method.

•Byemployinganinwardturret,thelong

workingdistanceobjectivesprovide

excellentoperability.

•Anergonomicdesignwithsuperb

operability:theFS70employstheerect-

imageopticalsystem(theimageinthe

eldofviewhasthesameorientationas

thespecimen)andenlargednefocus

adjustmentwheelwithrubbergripcoarse-

adjustmentknob.

FS70Z FS70L FS70L4

Technical Data

Focusadjustment

 •Method: Withconcentriccoarseandne

focusingwheels(rightandleft)

 •Range: 50mmtravelrange

0.1mm/rev.forneadjustment,

3.8mm/rev.forcoarseadjustment

TrinoculartubeImage: Erectimage

Pupildistance: Siedentopftype,

adjustmentrange:51-76mm

Fieldnumber: 24

Tiltangle: 0º-20º(only-TH,-THSmodels)

Illuminationsystem: Reectiveilluminationforbrighteld

(Koehlerillumination,withaperture

diaphragm)

Lightsource: 12V100Wber-optics,

non-steppedadjustment,

lightguidelength1.5m,

powerconsumption150W

Objectives(optional): MPlanApo,MPlanApoSL,GPlan

Apo

RefertotheMicroscopeUnitsleaet(E4191)

formoredetails.

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Mitutoyo TM-500 Series Manual de usuario Pagina 16

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