382
MICROSCOPES
SPECIFICATIONS
Model No. FS70 FS70-TH FS70Z FS70Z-TH FS70L FS70L-TH FS70L4 FS70L4-TH
Order No. 378-184-1 378-184-3 378-185-1 378-185-3 378-186-1 378-186-3 378-187-1 378-187-3
Model No. FS70-S FS70-THS FS70Z-S FS70Z-THS FS70L-S FS70L-THS FS70L4-S FS70L4-THS
Order No. 378-184-2 378-184-4 378-185-2 378-185-4 378-186-2 378-186-4 378-187-2 378-187-4
Focus With concentric coarse and fine focusing wheels (right and left)
adjustment (50mm travel range, 0.1mm/rev. for fine adjustment, 3.8mm/rev. for coarse adjustment)
Trinocular tube Image Erect image
Pupil distance Siedentopf type, adjustment range: 51 - 76mm
Field number 24
Tilt angle 0° - 20° (only -TH, -THS models)
Optical pass 50/50
-1
100/0 or 50/50
-1
100/0 or 100/0 or 100/0 or 100/0 or 100/0 or
ratio 0/100
-2
0/100
-2
0/100
-2
0/100
-2
0/100
-2
0/100
-2
Protective filter — — — — Built-in laser beam filter
Main unit Tube lens 1X 1X 1X -2X zoom 1X -2X zoom 1X 1X 1X 1X
Applicable YAG laser 1064/532/355nm — 1064/532/ 1064/532/ 1064/532/ 1064/532/
(when using optional tube) 355nm 355nm 355nm 355nm
Camera mount Adapter B (C-mount)
-3
— C-mount receptacle
(use a laser with the TV port.) (with green filter switch)
Illumination system Reflective illumination for bright field (Koehler illumination, with aperture diaphragm)
Light source 12V100W fiber optics, (non-stepped adjustment), light guide length 1.5m, power consumption 150W
Objectives
-3
For observation M Plan Apo
-4
, M Plan Apo SL, G Plan Apo
For laser-cutting — M/LCD Plan NIR
-5
,M Plan UV
M/LCD Plan NUV
-5
Loading weight
14.5kg 13.6kg 14.1kg 13.2kg
14.5kg 13.6kg 14.1kg 13.2kg
on optical tube
-6
Mass (main unit) 6.1kg 7.1kg 6.6kg 7.5kg 6.1kg 7.1kg 6.6kg 7.5kg
-1: Eyepiece/CCD camera
-2: Eyepiece/laser
-3: Optional
-4: M Plan Apo 1x should be used together with the the polarizer (378-092).
-5: Select model depending on the type of laser wavelength.
-6: Weight of objective lenses and eyepieces not included.
FS-70
SERIES 378 — Microscope Unit for Semiconductor Inspection
FEATURES
• The optical system that has originally developed for the best
seller FS 60 models was further enhanced for the FS70 models.
It is ideal as a microscope unit of a prober station for
semiconductors. (All models CE marked.)
• The FS70L supports three types of YAG laser wavelength ranges
(1064nm, 532nm and 355nm), while the FS70L4 supports two
types of wavelength ranges (532nm and 266nm), thus
expanding a scope of laser applications, allowing laser-cutting
of thin-films used in semiconductors and liquid crystal
substrates. However, Mitutoyo assumes no responsibility
whatsoever for the performance and/or safety of the laser
system used with Mitutoyo microscopes. a careful examination
is recommended in selecting a laser-emission unit.
• Bright field, Differential Interference Contrast (DIC) and
polarized observations are standard with the FS70Z. The FS70L
and FS70L4 do not support the DIC method.
• By employing an inward revolver, the long working distance
objectives provide excellent operatability.
• An ergonomic design with superb operatability: the FS70
employs the erect-image optical system (the image in the field
of view has the same orientation as the specimen) and enlarged
fine focus adjustment wheel with rubber grip coarse
adjustment knob.
(42 paginas)
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