Mitutoyo TM-500 Series Manual de usuario descargar pdf (Pagina 19)

380

MICROSCOPES

FS-300

SERIES 378 — High Power Inspection Microscope

FS-300 with optional accessories

SPECIFICATIONS

Main unit Observation system Bright field (BF): 378-320, 378-322, 378-324, 378-326

Bright/dark field (BF/DF): 378-321, 378-323, 378-325, 378-327

Reflected illumination Koehler illumination With aperture diaphragm (centering mechanism) and field stop

12V/100W halogen lamp (non-stepped brightness adjustment) With filter mounting slot (2-slot)

With BF/DF switching slide (378-321, 378-323, 378-325, 378-327 only)

Transmitted illumination 12V/100W fiber illumination (non-stepped brightness adjustment) With aperture diaphragm

(378-321, 378-323, 378-325, 378-327 only)

Focus adjustment With concentric coarse and fine focusing wheels (right and left)

Fine adjustment: 0.1mm/rev. for 32mm travel range Coarse adjustment: 3.8mm/rev. for 32mm travel range

Power revolver Inward type with 4 lens mounts

Workstage Travel stroke: 356 x 306mm with X-/Y-axis fine feed knobs and coarse travel handle

Optical tube Type Trinocular tube (erect image)

Field number 30: 378-320, 378-321, 378-322, 378-323 24: 378-324, 378-325, 378-326, 378-327

Depression angle Fixed 20°: 378-320, 378-321, 378-322, 378-323

Adjustable 0° to 20°: 378-324, 378-325, 378-326, 378-327

Intermediate image mag. 1X

Optical pass ratio Switchable (eyepiece/CCD camera=100/0 or 0/100)

Pupil distance Siedentopf type, adjustment range: 51 - 76mm

Eyepiece Field of view 10X/Ø30: 378-320, 378-321, 378-322, 378-323 10X/Ø24: 378-324, 378-325, 378-326, 378-327

Applicable objective (optional) M Plan Apo, M Plan Apo SL, G Plan Apo: 378-320, 378-322, 378-324, 378-326

BD Plan Apo, BD Plan Apo SL: 378-321, 378-323, 378-325, 378-327

Dimensions Main unit 360 x 803 x 568.5mm

Workstage 712 x 456.5mm

Power supply 100 to 240VAC, 50/60Hz

Power consumption Approx. 150W: 378-320, 378-321, 378-324, 378-325 Approx. 300W: 378-322, 378-323, 378-326, 378-327

Mass Approx. 50kg including workstage

The FS-300 is designed for inspecting microcomponents such as

IC chips and video head parts. The optical system features ultra-

long working distance objectives, wide view field eyepieces, and

independent correction for lateral chromatic aberration.

FEATURES

• The complete system of FS-300 can be composed of a variety of

parts for meeting diverse applications.

• Available with or without a transmitted illuminator.

• Ultra-long working distance objectives provide easy

manipulation of workpieces.

• Easy switching between the bright-field illumination and the

dark-field illumination.

• Optional accessories widen the range of applications.

Polarized light observation:

Observing only the filtered light that

vibrates in one direction. Used for

observing materials with special

optical characteristics, such as

mineral and liquid crystal.

Differential interference

observation:

Effective in detecting fine scratches

and steps on the surface of metal,

liquid crystal, and semiconductors.

Bright field observation:

Most common method of

observation. Observing directly the

light reflected on the surface of

workpiece.

Dark field observation:

Observing only the scattered light by

shutting down the direct light to the

objectives. The scratches and dust

that cannot be viewed in the bright

view field can be observed by a high-

contrast.

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Mitutoyo TM-500 Series Manual de usuario Pagina 19

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